仪器设备

Facilities

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  真空感应熔炼炉

  Vacuum Induction Melting Furnace

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  高通量磁控溅射沉积

  High-throughput Magnetron Sputtering Depositon

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  高通量扫描电子显微镜

  High-throughput Scanning Electron Microscopy

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  高通量X射线衍射仪

  High-throughput X Ray Diffractometer

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  高通量薄膜电阻测试系统

  High-throughput Film Resistivity Measurement System

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  高通量椭偏仪

  High-throughput Ellipsometer

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