EX11成立于2020年。课题组现有高通量磁控溅射沉积设备两台，高通量表征设备四台，包括扫描电子显微镜，X射线衍射仪，高通量电阻测量设备，高通量椭偏仪，可以实现成分、结构、电学性能、光学性能的高通量表征。

EX11 was founded in 2020. The leader of the research group is Yanhui Liu, a candidate for the "Thousands of Young People" of the Central Organization Department, and a researcher of the "Hundred Talents Program" of the Chinese Academy of Sciences. Now our group has two high-throughput magnetron sputtering deposition equipment and four high-throughput characterization equipment including scanning electron microscope, X-ray diffractometer, high-throughput resistance measurement equipment, and ellipsometer, the composition, structure, electrical property and optical property can be high-throughput characterized.